Overview
EpiDetector
EpiHBT InGaP/GaAs
EpiHBT InP
EpiLaser AlGaAs/GaAs Edge-Emitter Industry Roadmap Capabilities
Don't be misled that high-performance products and reliable volume manufacturing can't go hand-in-hand. At EpiWorks, we know they can.
EpiWorks' quality and service are no accident. Our seasoned manufacturing team is skilled at growth, characterization, and device technology.
Now is the time to partner with EpiWorks to keep your technology a generation ahead. Check out our industry roadmap to see how our epiwafers excel.
Wafer size: 50, 75, 100, 150 mm
Technique: LP-MOCVD
MOCVD production capability overview
- Aixtron 2600 G3 production platform
- 18,000 square foot facility
- 5,000 square foot, class 1000 cleanroom
Standard materials test and characterization capabilities
- Full-wafer mapping from 50 mm to 150 mm
- KLA-Tencor Surfscan 6220
- Lehighton LEI1510RS resistivity
- Accent RPM2000 PL
- Bede QC200 X-ray
- Accent HL5500PC hall
- Tencor AlphaStep
- Accent polaron ECV profiler
- Nomarski microscopy
- Full-wafer quick-lot device fabrication
- Full electrical DC test
EpiWorks wireless and wireline products (all grown by MOCVD)
Product | Base Material | Material Capability | Wafer Diameter |
| EpiHBT™ |
GaAs |
InGaP/GaAs |
up to 150 mm |
| InP |
InP/InGaAs (carbon doping) |
up to 100 mm |
| EpiFET™ |
GaAs |
InGaP/GaAs, AlGaAs/GaAs |
up to 150 mm |
| InP |
InP/InGaAs, InP/InAlAs |
up to 100 mm |
| EpiLaser™ |
GaAs |
AlGaAs/GaAs, InGaP/GaAs |
up to 150 mm |
| InP |
InP/InGaAs, InGaAsP, InAlAs, InAlGaAs |
up to 100 mm |
| EpiDetector™ |
GaAs |
AlGaAs/GaAs, InGaP/GaAs |
up to 150 mm |
| InP |
InP/InGaAs, InGaAsP, InAlGaAs |
up to 100 mm |
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