CHAMPAIGN-URBANA, ILLINOIS – November 9, 2004 – Today, Illinois based EpiWorks, Inc., a leading developer and manufacturer of compound semiconductor epitaxial wafers, and AIXTRON, Inc. announced the completion of the implementation of a high throughput MOCVD reactor design for 6″ InGaP HBTs. EpiWorks has been delivering production shipments using the new process since Q1 of 2004.
“After several quarters of production, EpiWorks is proud to announce the successful qualification of the AIXTRON 2600G3 Planetary MOCVD reactor featuring the 7×6″ configuration for industrial HBT production”, said Dr. Quesnell Hartmann, President of EpiWorks. “Together with AIXTRON, we have developed a high throughput process with excellent uniformity, performance and reliability. It is well understood that the dominant factors for effective HBT volume production are yield and throughput. Though we are not a large company, this new process provides significant throughput and cost advantages, which allow us to compete with much larger companies.
The project involved AIXTRON retrofitting a standard reactor design with the 7×6″ components, and EpiWorks developing a Carbon-doped InGaP HBT process with excellent on-wafer, and wafer- to-wafer uniformities. The base layer, which is the most critical layer in the HBT, was optimized for quality and uniformity, along with the dc device parameters. The on-wafer base sheet resistance uniformity and the variation from wafer-to-wafer for 6” wafers is less than 3% for a production-qualified process. Wafers based on this process have been fully qualified by EpiWorks’ customers and are currently used in the production of PAs for wireless handsets and WLAN components.
“To date, our 7×6″ configuration has mainly been used for PHEMT production. Today, we are excited to announce that the reactor design is also proven to support EpiWorks’ stringent HBT production requirements,” said Bernd Schulte, Executive Vice President and COO of AIXTRON. “We are aware of the need for our customers to reduce their manufacturing costs and improve yield, and this reactor design can improve throughput by as much as 40% over the standard 5×6″ design.”
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EpiWorks, Inc. develops and manufactures compound semiconductor epitaxial wafers for application in optical components, wireless devices and high-speed communication systems. The company’s products provide these applications additional performance, such as greater bandwidth, higher power efficiency and better reliability. EpiWorks’ business model includes high-level customer interaction and co-development to rapidly advanced its customers’ technology capability and product performance.